Sxfive FE

Field Emission Electron Probe Micro Analyzer for Quantitative Analysis and X-Ray Mapping at the Highest Possible Spatial Resolution

The SXFiveFE is CAMECA’s fifth generation electron probe microanalyzer. It brings together all of the best features of CAMECA’s previous EPMA models and incorporates a number of outstanding features, including the unique combination of a field emission electron column with CAMECA's industry-leading high-sensitivity and resolution spectrometers.
The SXFiveFE performs high accuracy quantitative chemical microanalysis at highest possible spatial resolution in mineralogy, geochronology, and material sciences.

Optimized Field Emission electron column

The SXFiveFE is equipped with a Field Emission (FE) electron source (Schottky emitter). The electron column has been optimized to achieve small beam diameters with high beam currents even at low accelerating voltages thus enabling X-ray mapping and quantitative analysis at extremely high spatial resolution. The beam intensity is accurately measured with an annular Faraday cup and is continuously regulated, achieving a stability of 0.5% per hour, thus enabling reliable quantitative analyses. The high voltage system operates at up to 30 kV for elements with high atomic number.