TETRA Teknolojik Sistemler A.Ş.
CAMECA

SC Ultra

High Performance Magnetic Sector SIMS for Advanced Semiconductors

The CAMECA SC Ultra has been specifically designed to meet the increasing needs for dynamic SIMS measurements in advanced semiconductors.

From standard to ultra-shallow depth profiling

A first requisite to the analysis of advanced semiconductors is the optimization of SIMS analytical conditions for ultra-shallow depth profiling without giving up standard depth profiling applications. CAMECA has therefore developed a SIMS instrument capable of sputtering samples with a large range of impact energies: from high energy (keV range) for thick structures to Ultra-Low Energy (≤ 150eV) for ultra-thin structures. This flexibility in the impact energy choice is available for different well-controlled sputtering conditions (species, incidence angle, etc...).

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ANKARA0312 472 63 63

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İZMİR0232 239 79 49

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