PHI 710 — High-Resolution Auger Electron Spectrometer (AES)

PHI 710 — High-Resolution Auger Electron Spectrometer (AES)

PHI 710 is an advanced Auger Electron Spectroscopy (AES) system designed for nanoscale surface chemistry and elemental analysis. It characterizes the surface composition, chemical bonding states, and microstructural properties of materials with high precision.

Key Features

• High Spatial Resolution: Nano-scale analysis with ≤ 10 nm resolution.

• Multiple Analysis Modes: Integration of AES, SEM (Scanning Electron Microscopy), and EDX (Energy-Dispersive X-ray Spectroscopy).

• Depth Profiling: Depth-based analysis of layered structures via ion beam.

• Broad Energy Range: Elemental and chemical mapping in 0–10 keV range.

• Auto-Alignment: Precise beam focusing with PHI SmartAlign™ software.

Application Areas

• Materials Science: Surface chemistry of metal alloys, coatings, and thin films.

• Semiconductor Analysis: Contamination and failure analysis in integrated circuits.

• Corrosion Studies: Investigation of surface oxidation and corrosion mechanisms.

• Nanotechnology: Elemental distribution of nanoparticles and nanocoatings.

• Quality Control: Detection of surface impurities in production lines.

Technical Specifications

• Electron Source: Schottky field emission electron gun.

• Analyzer: Cylindrical mirror analyzer (CMA) with high energy resolution.

• Vacuum System: Base pressure < 5×10⁻¹⁰ Torr.

• Sample Size: Samples up to 150 mm in diameter.

• Detectors: Multi-channel detector for rapid data acquisition.